Fabrication and characterization of superconducting coplanar waveguide resonators

Bongkeon Kim; Minkyung Jung; Jihwan Kim; Junho Suh; Yong Joo Doh

doi:10.9714/psac.2020.22.4.010

Fabrication and characterization of superconducting coplanar waveguide resonators

Bongkeon Kim, Minkyung Jung, Jihwan Kim, Junho Suh, Yong Joo Doh

Division of Nanotechnology

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures.

Original language	English
Pages (from-to)	10-13
Number of pages	4
Journal	Progress in Superconductivity and Cryogenics (PSAC)
Volume	22
Issue number	4
DOIs	https://doi.org/10.9714/psac.2020.22.4.010
State	Published - 2020

Bibliographical note

Publisher Copyright:
© 2020, Korea Institute of Applied Superconductivity and Cryogenics. All rights reserved.

Keywords

Circuit quantum electrodynamics
Coplanar waveguide
Superconducting resonator

Access to Document

10.9714/psac.2020.22.4.010

Cite this

@article{f2b3c5d40e6c4604bb928e4fb56c6333,

title = "Fabrication and characterization of superconducting coplanar waveguide resonators",

abstract = "High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures.",

keywords = "Circuit quantum electrodynamics, Coplanar waveguide, Superconducting resonator",

author = "Bongkeon Kim and Minkyung Jung and Jihwan Kim and Junho Suh and Doh, {Yong Joo}",

year = "2020",

doi = "10.9714/psac.2020.22.4.010",

language = "English",

volume = "22",

pages = "10--13",

journal = "Progress in Superconductivity and Cryogenics (PSAC)",

issn = "1229-3008",

publisher = "Korea Institute of Applied Superconductivity and Cryogenics",

number = "4",

}

TY - JOUR

T1 - Fabrication and characterization of superconducting coplanar waveguide resonators

AU - Kim, Bongkeon

AU - Jung, Minkyung

AU - Kim, Jihwan

AU - Suh, Junho

AU - Doh, Yong Joo

PY - 2020

Y1 - 2020

N2 - High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures.

AB - High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures.

KW - Circuit quantum electrodynamics

KW - Coplanar waveguide

KW - Superconducting resonator

UR - http://www.scopus.com/inward/record.url?scp=85101262473&partnerID=8YFLogxK

U2 - 10.9714/psac.2020.22.4.010

DO - 10.9714/psac.2020.22.4.010

M3 - Article

AN - SCOPUS:85101262473

SN - 1229-3008

VL - 22

SP - 10

EP - 13

JO - Progress in Superconductivity and Cryogenics (PSAC)

JF - Progress in Superconductivity and Cryogenics (PSAC)

IS - 4

ER -

Fabrication and characterization of superconducting coplanar waveguide resonators

Abstract

Bibliographical note

Keywords

Access to Document

Other files and links

Fingerprint

Cite this