Abstract
We have successfully fabricated piezoelectric PMN-PT single crystal cantilever array. Each PMN-PT cantilever has a different length to achieve different resonance frequencies. The width and thickness of PMN-PT cantilever array are 200 μm and 10 μm, respectively. Resonance frequencies of PMN-PT cantilevers were measured with laser interferometer, and charge sensitivity was measured with charge-measuring device. PMN-PT cantilever array was installed in a noise-shield case. The array was then exposed to sound pressure frequency corresponding to resonance frequency to measure its sensitivity. The experimental results show that the PMN-PT cantilever array has high sensitivity to the sound pressure. This implies that the single crystal PMN-PT cantilever array is a potential candidate for a cochlear-like acoustic sensor.
| Original language | English |
|---|---|
| Pages (from-to) | 181-184 |
| Number of pages | 4 |
| Journal | Journal of Mechanical Science and Technology |
| Volume | 24 |
| Issue number | 1 |
| DOIs | |
| State | Published - Feb 2010 |
Bibliographical note
Funding Information:Financial support from the Future Convergence Technology Pioneer Research Program of KOSEF is gratefully acknowledged.
Keywords
- Acoustic sensor
- Cantilever array
- PMN-PT
- Piezoelectric
- Resonance
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