Effects of rapid thermal annealing on the magnetic properties of CoSiB/Pd multilayers with perpendicular anisotropy

The perpendicular magnetic anisotropic property of amorphous CoSiB/Pd multilayers was studied as a function of the thicknesses of the CoSiB and the number of repeated CoSiB/Pd bilayers. In this study, we investigate the effects of thermal annealing on the perpendicular magnetic anisotropic property of the [CoSiB 2, 3, 4, 5 Å/Pd 13 Å]₅ multilayer films. We vary the annealing temperature between from 200 to 350°, with the thicknesses of the CoSiB layer being kept constant. We examine the magnetic properties such as the saturation magnetization and the coercivity. The annealing temperature is closely related to the magnetic property of the CoSiB/Pd multilayers, and the coercivity especially is proportional to the annealing temperature.