Abstract
An effect of underlayer microstructure on the exchange coupling of Mumetal/AlOx/Co multilayer was discussed. The Mumetal/AlOx/Co multilayers were deposited on the silicon wafer with thermally grown SiO2. The cross sectional transmission electron microscopy (TEM) image of magnetic tunnel junction (MTJ) multilayer was shown. Crystalline phase and grain size were measured by x-ray diffraction.
| Original language | English |
|---|---|
| Pages (from-to) | ES12 |
| Journal | Digests of the Intermag Conference |
| State | Published - 2002 |
| Event | 2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands Duration: 28 Apr 2002 → 2 May 2002 |
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