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Effect of Si lattice strain on the reliability characteristics of ultrathin SiO2 on a 4° tilted wafer
Hyo Sik Chang, Sangmu Choi, Hyundoek Yang, Kyung Youl Min, Dae Won Moon, Hyung Ik Lee, Hyunsang Hwang
Research output: Contribution to journal › Article › peer-review
12
Scopus
citations