@inproceedings{348324d1b78d426ebe09641acddf49ce,
title = "Effect of prepared conditions on soft magnetic properties and microstructure of CoFeHfO thin film",
abstract = "CoFeHfO thin films have been prepared by RF-sputtering method. Prepared conditions are the most important to take shape microstructure of thin films. In order to find out the optimal conditions to fabricate CoFeHfO thin films which exhibit the best magnetic properties to application for high frequency, relation between prepared conditions and soft magnetic properties have been investigated. The results shows that excellent soft magnetic properties were associated strongly with orientation and grain size of α-CoFe and α-Co(Fe) phases. Orientation of nanocrystaline depends strongly on the time sputtering (film thickness) because of interaction energy. Grain size and resistivity depend on oxygen and deposition rate because of reaction when sputtering. Consequently, the film with thickness of 300 nm and partial of oxygen of 6 % is nearly single phased and exhibits excellence magnetic properties with the value of coercivity Hc of 0.18 Oe and anisotropy magnetic Hk of 49.92 Oe, along the hard axis.",
keywords = "High frequency, Magnetic properties, Microstructure, Prepared conditions",
author = "Tho, {L. V.} and Lee, {K. E.} and Kim, {C. G.} and Kim, {C. O.}",
year = "2007",
doi = "10.1109/NEMS.2007.352235",
language = "English",
isbn = "1424406102",
series = "Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007",
pages = "1202--1205",
booktitle = "Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007",
note = "2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 ; Conference date: 16-01-2007 Through 19-01-2007",
}