Abstract
Figure Presented Drawing lithography is a novel fabrication technique in which a thermosetting polymer is directly drawn from a two-dimensional solid surface without the need for a mask and light irradiation (see figure). Drawing lithography differs from traditional lithography techniques, such as photolithography, in that it is based on the inherently planar geometries of a two-dimensional substrate in a three-dimensional microstructure.
| Original language | English |
|---|---|
| Pages (from-to) | 483-486 |
| Number of pages | 4 |
| Journal | Advanced Materials |
| Volume | 22 |
| Issue number | 4 |
| DOIs | |
| State | Published - 26 Jan 2010 |
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