Direct monitoring of generated particles in plasma enhanced chemical vapor deposition process using temperature compensating quartz crystal microbalance
- Il Ryu Jang
- , Hyeong U. Kim
- , Taehoon Kim
- , Minwoo Kweun
- , Geon Woong Eom
- , In Yong Park
- , Sangho Lee
- , Seongho Kim
- , Minji Kang
- , Kyeong Jun Park
- , Wooseok Kang
- , Hoe Joon Kim
- Daegu Gyeongbuk Institute of Science and Technology
- University of California at Berkeley
- Korea Institute of Machinery and Materials
- University of Science and Technology UST
- Seoul National University of Science and Technology (SNUST)
- Chungnam National University
Research output: Contribution to journal › Article › peer-review
1
Scopus
citations