Abstract
Pb 0.65Ba 0.35ZrO 3 (PBZ) thin films [1] were grown on MgO (001) substrates by pulsed laser deposition (PLD), We compared the structural and dielectric properties of PBZ thin films grown at various temperatures. A high c-axis orientation appeared in PBZ thin film grown at a deposition temperature of 550°C. The c-axis-oriented PBZ thin film also showed the largest tunability among all the PBZ thin films in capacitance-voltage measurements. The tunability and dielectric loss of the PBZ thin film were 20 % and 0.00959, respectively. In addition, we compared the temperature coefficient of capacitance (TCC) of a PBZ thin film with that of a Ba 0.5Sr 0.5TiO 3 (BST) thin film, which is a well-known material applicable to tunable microwave devices. We confirmed that the TCC value of a PBZ thin film was three times smaller than that of a BST thin film.
| Original language | English |
|---|---|
| Pages (from-to) | S243-S246 |
| Journal | Journal of the Korean Physical Society |
| Volume | 47 |
| Issue number | SUPPL. 2 |
| State | Published - Sep 2005 |
Keywords
- BST
- Microwave tunable device
- PBZ
- Pulsed laser deposition
- TCC
- Tunability