| Original language | English |
|---|---|
| Pages (from-to) | 323-326 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 22 |
| Issue number | 1 |
| DOIs | |
| State | Published - 2004 |
Development of multiple As delta layer Si reference thin film for shallow junction secondary ion mass spectrometry profiling
- D. W. Moon
- , H. I. Lee
- , H. K. Kim
- , K. J. Kim
- , H. K. Shon
- , J. Y. Won
- , J. C. Lee
- , F. Toujou
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations