Development of C60 plasma ion source for time-of-flight secondary ion mass spectrometry applications

  • Qing Ji
  • , Ye Chen
  • , Lili Ji
  • , Sami Hahto
  • , Ka Ngo Leung
  • , Tae Geol Lee
  • , Dae Won Moon

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Initial data from a multicusp ion source developed for buckminsterfullerene (C60) cluster ion production are reported in this article. A C60+ beam current of 425 nA and a C60- beam current of 200 nA are obtainable in continuous mode. Compared to prior work using electron impact ionization, the multicusp ion source provides at least two orders of magnitude increase in the extractable C60+ beam current. Mass spectra for both positive and negative bismuth cluster ions generated by the multicusp ion source are also included.

Original languageEnglish
Article number02B309
JournalReview of Scientific Instruments
Volume79
Issue number2
DOIs
StatePublished - 2008

Bibliographical note

Funding Information:
This work is supported by the Nano-Bio Science and Technology of MOST. Support from members of Plasma and Ion Source Technology at Lawrence Berkeley National Laboratory in U.S.A. is gratefully acknowledged.

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