TY - JOUR
T1 - Design of a piezoelectric-driven tilt mirror for a fast laser scanner
AU - Park, Jung Ho
AU - Lee, Hu Seung
AU - Lee, Jae Hoon
AU - Yun, So Nam
AU - Ham, Young Bog
AU - Yun, Dong Won
PY - 2012/9
Y1 - 2012/9
N2 - Recently, laser scanners have been used for laser processing such as cutting, welding, and grooving, especially in the automotive industry. The laser scanners need a high-speed driving to minimize cracks caused by thermal shock of brittle materials. Therefore, a novel laser processing system that is composed of a laser source and a piezoelectric-driven tilt mirror to control the reflection angle of the laser beam, and a stage equipped with the tilt mirror has been investigated. In this study, a piezoelectric-driven tilt mirror is designed and analyzed for scanning performance to achieve a beam spot of 30μm, a pattern width of 1 mm, an overlap ratio of 70% of the circle area, and a scanning speed of 1 m/s. Then, structural analysis of the tilt mirror with three piezoelectric actuators is performed to determine the maximum reflection angle and resonance frequency. Finally, a prototype tilt mirror is fabricated and its basic characteristics are experimentally investigated and discussed.
AB - Recently, laser scanners have been used for laser processing such as cutting, welding, and grooving, especially in the automotive industry. The laser scanners need a high-speed driving to minimize cracks caused by thermal shock of brittle materials. Therefore, a novel laser processing system that is composed of a laser source and a piezoelectric-driven tilt mirror to control the reflection angle of the laser beam, and a stage equipped with the tilt mirror has been investigated. In this study, a piezoelectric-driven tilt mirror is designed and analyzed for scanning performance to achieve a beam spot of 30μm, a pattern width of 1 mm, an overlap ratio of 70% of the circle area, and a scanning speed of 1 m/s. Then, structural analysis of the tilt mirror with three piezoelectric actuators is performed to determine the maximum reflection angle and resonance frequency. Finally, a prototype tilt mirror is fabricated and its basic characteristics are experimentally investigated and discussed.
UR - https://www.scopus.com/pages/publications/84867727596
U2 - 10.1143/JJAP.51.09MD14
DO - 10.1143/JJAP.51.09MD14
M3 - Article
AN - SCOPUS:84867727596
SN - 0021-4922
VL - 51
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 9 PART3
M1 - 09MD14
ER -