Decrease in switching voltage fluctuation of PtNi Ox Pt structure by process control

Ranju Jung, Myoung Jae Lee, Sunae Seo, Dong Chirl Kim, Gyeong Su Park, Kihong Kim, Seungeon Ahn, Youngsoo Park, In Kyeong Yoo, Jin Soo Kim, Bae Ho Park

Research output: Contribution to journalArticlepeer-review

64 Scopus citations

Abstract

Resistance change random access memory devices using Ni Ox films with resistance switching properties have immense potential for high-density nonvolatile memory exceeding currently used flash memory. The only critical failure of a Ni Ox film is to write wrong information due to large fluctuations of switching voltages during successive resistance switching operations. The authors show that failure-free Ni Ox film can be grown directly on Pt electrode just by process control. Intensive analyses show that the superior resistance switching behaviors of their simple PtNi Ox Pt structure may result from a very thin Ni-Pt layer self-formed at the bottom interface during deposition of Ni Ox.

Original languageEnglish
Article number022112
JournalApplied Physics Letters
Volume91
Issue number2
DOIs
StatePublished - 2007

Bibliographical note

Funding Information:
One of the authors (B.H.P.) was supported by Konkuk University in 2003.

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