Damping directly impacts flicker frequency noise of piezoelectric aluminum nitride resonators

Hoe Joon Kim; Jeronimo Segovia-Fernandez; Gianluca Piazza

doi:10.1109/MEMSYS.2016.7421714

Damping directly impacts flicker frequency noise of piezoelectric aluminum nitride resonators

Hoe Joon Kim
, Jeronimo Segovia-Fernandez
, Gianluca Piazza

Department of Robotics and Mechatronics Engineering

Carnegie Mellon University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

This paper presents an analysis on the effect of damping on flicker frequency (1/f) noise of 1.1 GHz aluminum nitride (AlN) contour mode resonators (CMR). A total of 52 different AlN-CMRs are systemically designed and fabricated to give quality factors (Q) ranging from 300 to 3500, allowing the study of how two major damping mechanisms in AlN-CMRs, 1) anchor losses and 2) thermoelastic damping (TED), affect the resonator 1/f noise. In total, we have measured 104 CMRs and the results confirm that 1/f noise shows a clear power law dependence that is close to 1/Q3, independently of the main nature of the damping mechanism. Understanding and accounting for the effect of damping on 1/f noise is crucial for building ultra-low noise Microelectromechanical systems (MEMS) resonators for sensing, timing, and frequency applications.

Original language	English
Title of host publication	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	667-670
Number of pages	4
ISBN (Electronic)	9781509019731
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421714
State	Published - 26 Feb 2016
Event	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2016-February
ISSN (Print)	1084-6999

Conference

Conference	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country/Territory	China
City	Shanghai
Period	24/01/16 → 28/01/16

Bibliographical note

Publisher Copyright:
© 2016 IEEE.

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10.1109/MEMSYS.2016.7421714

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Kim, H. J., Segovia-Fernandez, J., & Piazza, G. (2016). Damping directly impacts flicker frequency noise of piezoelectric aluminum nitride resonators. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 667-670). Article 7421714 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421714

Kim, Hoe Joon ; Segovia-Fernandez, Jeronimo ; Piazza, Gianluca. / Damping directly impacts flicker frequency noise of piezoelectric aluminum nitride resonators. MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 667-670 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "This paper presents an analysis on the effect of damping on flicker frequency (1/f) noise of 1.1 GHz aluminum nitride (AlN) contour mode resonators (CMR). A total of 52 different AlN-CMRs are systemically designed and fabricated to give quality factors (Q) ranging from 300 to 3500, allowing the study of how two major damping mechanisms in AlN-CMRs, 1) anchor losses and 2) thermoelastic damping (TED), affect the resonator 1/f noise. In total, we have measured 104 CMRs and the results confirm that 1/f noise shows a clear power law dependence that is close to 1/Q3, independently of the main nature of the damping mechanism. Understanding and accounting for the effect of damping on 1/f noise is crucial for building ultra-low noise Microelectromechanical systems (MEMS) resonators for sensing, timing, and frequency applications.",

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Kim, HJ, Segovia-Fernandez, J & Piazza, G 2016, Damping directly impacts flicker frequency noise of piezoelectric aluminum nitride resonators. in MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems., 7421714, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2016-February, Institute of Electrical and Electronics Engineers Inc., pp. 667-670, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421714

Damping directly impacts flicker frequency noise of piezoelectric aluminum nitride resonators. / Kim, Hoe Joon; Segovia-Fernandez, Jeronimo; Piazza, Gianluca.
MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. p. 667-670 7421714 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Damping directly impacts flicker frequency noise of piezoelectric aluminum nitride resonators

AU - Kim, Hoe Joon

AU - Segovia-Fernandez, Jeronimo

AU - Piazza, Gianluca

PY - 2016/2/26

Y1 - 2016/2/26

N2 - This paper presents an analysis on the effect of damping on flicker frequency (1/f) noise of 1.1 GHz aluminum nitride (AlN) contour mode resonators (CMR). A total of 52 different AlN-CMRs are systemically designed and fabricated to give quality factors (Q) ranging from 300 to 3500, allowing the study of how two major damping mechanisms in AlN-CMRs, 1) anchor losses and 2) thermoelastic damping (TED), affect the resonator 1/f noise. In total, we have measured 104 CMRs and the results confirm that 1/f noise shows a clear power law dependence that is close to 1/Q3, independently of the main nature of the damping mechanism. Understanding and accounting for the effect of damping on 1/f noise is crucial for building ultra-low noise Microelectromechanical systems (MEMS) resonators for sensing, timing, and frequency applications.

AB - This paper presents an analysis on the effect of damping on flicker frequency (1/f) noise of 1.1 GHz aluminum nitride (AlN) contour mode resonators (CMR). A total of 52 different AlN-CMRs are systemically designed and fabricated to give quality factors (Q) ranging from 300 to 3500, allowing the study of how two major damping mechanisms in AlN-CMRs, 1) anchor losses and 2) thermoelastic damping (TED), affect the resonator 1/f noise. In total, we have measured 104 CMRs and the results confirm that 1/f noise shows a clear power law dependence that is close to 1/Q3, independently of the main nature of the damping mechanism. Understanding and accounting for the effect of damping on 1/f noise is crucial for building ultra-low noise Microelectromechanical systems (MEMS) resonators for sensing, timing, and frequency applications.

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PB - Institute of Electrical and Electronics Engineers Inc.

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Kim HJ, Segovia-Fernandez J, Piazza G. Damping directly impacts flicker frequency noise of piezoelectric aluminum nitride resonators. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2016. p. 667-670. 7421714. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2016.7421714

Damping directly impacts flicker frequency noise of piezoelectric aluminum nitride resonators

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