TY - GEN
T1 - Braille code display device with a PDMS membrane and thermopneumatic actuator
AU - Kwon, Hyuk Jun
AU - Seok, Woo Lee
AU - Lee, Seung S.
PY - 2008
Y1 - 2008
N2 - The Braille code display device with a PDMS (polydimethylsiloxane) membrane and thermopneumatic actuator is fabricated and tested. One dot (pixel) whose dimension is 3mm x 3mm among six dots in the Braille code is fabricated by using RIE (reactive ion etching), chemical wet etching, and E-beam evaporating. When applied input voltage is under 6Vpp, the deflections of the membranes occur under the thickness of the silicon substrate. On the other hand, when 8Vpp and 10Vpp are applied at 40μm and 110μm thickness membranes, the deflections happen about 1mm, 0.4mm, 1.3mm, and 1.4mm over the substrate, respectively. The deflection of fabricated device is accomplished over 2 times larger than 600μm standard height designated by Korea Blind Union.
AB - The Braille code display device with a PDMS (polydimethylsiloxane) membrane and thermopneumatic actuator is fabricated and tested. One dot (pixel) whose dimension is 3mm x 3mm among six dots in the Braille code is fabricated by using RIE (reactive ion etching), chemical wet etching, and E-beam evaporating. When applied input voltage is under 6Vpp, the deflections of the membranes occur under the thickness of the silicon substrate. On the other hand, when 8Vpp and 10Vpp are applied at 40μm and 110μm thickness membranes, the deflections happen about 1mm, 0.4mm, 1.3mm, and 1.4mm over the substrate, respectively. The deflection of fabricated device is accomplished over 2 times larger than 600μm standard height designated by Korea Blind Union.
UR - http://www.scopus.com/inward/record.url?scp=50149119275&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2008.4443709
DO - 10.1109/MEMSYS.2008.4443709
M3 - Conference contribution
AN - SCOPUS:50149119275
SN - 9781424417933
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 527
EP - 530
BT - MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
T2 - 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Y2 - 13 January 2008 through 17 January 2008
ER -