Batch Fabrication of Transfer-Free Graphene-Coated Microcantilevers

Hoe Joon Kim, Jonghyun Choi, Sungwoo Nam, William Paul King

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

This letter reports a method for transfer-free graphene growth and its application to batch fabrication of graphene-coated microcantilevers. Transfer-free graphene was synthesized directly on insulating substrates from solid carbon sources of poly(methyl methacrylate) or amorphous carbon. The graphene thickness and quality were controlled by optimizing the amount of solid carbon source, annealing temperature, and growth time. This synthesis method was then used to fabricate more than 100 graphene-coated cantilevers on a silicon substrate of size 2 cm x 2.5 cm. More than 90% of the cantilever surface was coated with high-quality multilayer graphene, and the overall device yield was ∼75%.

Original languageEnglish
Article number7046377
Pages (from-to)2717-2718
Number of pages2
JournalIEEE Sensors Journal
Volume15
Issue number5
DOIs
StatePublished - 26 May 2015

Bibliographical note

Publisher Copyright:
© 2001-2012 IEEE.

Keywords

  • Cantilever
  • Graphene

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