Abstract
The reliability issues of the hemi-cylindrical (HC) vertical NAND (VNAND) flash memory are investigated with various channel hole remaining ratios (CHRRs). Unlike conventional VNAND cells, carriers are nonuniformly injected to the charge-trapping layer in the case of HC VNAND during program/erase operations. Hence, in addition to conventional lateral migration, a novel charge redistribution mechanism - -azimuthal redistribution (AR) - -is proposed. The simulation and experimental results indicate that AR is a major component of the data retention as a function of the CHRR of HC VNAND cells.
Original language | English |
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Pages (from-to) | 931-934 |
Number of pages | 4 |
Journal | IEEE Electron Device Letters |
Volume | 44 |
Issue number | 6 |
DOIs | |
State | Published - 1 Jun 2023 |
Bibliographical note
Publisher Copyright:© 1980-2012 IEEE.
Keywords
- Hemi-cylindrical vertical NAND (HC VNAND)
- azimuthal redistribution (AR)
- channel hole remaining ratio (CHRR)
- data retention