Azimuthal Charge Redistribution of Hemi-Cylindrical Vertical NAND Flash Memory

Ji Ho Uhm, Jin Ho Chang, Joonggyu Kim, Eunmee Kwon, Woo Young Choi

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

The reliability issues of the hemi-cylindrical (HC) vertical NAND (VNAND) flash memory are investigated with various channel hole remaining ratios (CHRRs). Unlike conventional VNAND cells, carriers are nonuniformly injected to the charge-trapping layer in the case of HC VNAND during program/erase operations. Hence, in addition to conventional lateral migration, a novel charge redistribution mechanism - -azimuthal redistribution (AR) - -is proposed. The simulation and experimental results indicate that AR is a major component of the data retention as a function of the CHRR of HC VNAND cells.

Original languageEnglish
Pages (from-to)931-934
Number of pages4
JournalIEEE Electron Device Letters
Volume44
Issue number6
DOIs
StatePublished - 1 Jun 2023

Bibliographical note

Publisher Copyright:
© 1980-2012 IEEE.

Keywords

  • Hemi-cylindrical vertical NAND (HC VNAND)
  • azimuthal redistribution (AR)
  • channel hole remaining ratio (CHRR)
  • data retention

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