Analog silicon photonic MEMS phase-shifter with double-step electrostatic actuation

Hamed Sattari; Teodoro Graziosi; Marcell Kiss; Tae Joon Seok; Sangyoon Han; Ming C. Wu; Niels Quack

doi:10.1109/OMN.2017.8051437

Analog silicon photonic MEMS phase-shifter with double-step electrostatic actuation

Hamed Sattari, Teodoro Graziosi, Marcell Kiss, Tae Joon Seok, Sangyoon Han, Ming C. Wu, Niels Quack

Department of Robotics and Mechatronics Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

We present the design of an analog Silicon Photonic MEMS phase shifter based on vertically moving adiabatic couplers. Using a two-step electrostatic actuation method, the phase shifter can be turned on selectively by applying an actuation voltage on a first pair of electrodes, and the phase of the optical signal can be tuned continuously by applying an actuation voltage at a second electrode pair. A mechanical movement of only 20nm at 19V actuation voltage allows for a full π phase shift. The design exhibits a compact footprint of 60um × 44um and low excess insertion loss below 0.1dB.

Original language	English
Title of host publication	2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781538607374
DOIs	https://doi.org/10.1109/OMN.2017.8051437
State	Published - 26 Sep 2017
Event	22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Santa Fe, United States Duration: 13 Aug 2017 → 17 Aug 2017

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
Country/Territory	United States
City	Santa Fe
Period	13/08/17 → 17/08/17

Bibliographical note

Publisher Copyright:
© 2017 IEEE.

Keywords

Adiabatic Coupler
Optical Switch
Phase Control
Photonic Integrated Circuit
Silicon Photonic MEMS

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10.1109/OMN.2017.8051437

Cite this

Sattari, H., Graziosi, T., Kiss, M., Seok, T. J., Han, S., Wu, M. C., & Quack, N. (2017). Analog silicon photonic MEMS phase-shifter with double-step electrostatic actuation. In 2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings Article 8051437 (International Conference on Optical MEMS and Nanophotonics). IEEE Computer Society. https://doi.org/10.1109/OMN.2017.8051437

@inproceedings{509e1998195044acabc135df79520394,

title = "Analog silicon photonic MEMS phase-shifter with double-step electrostatic actuation",

abstract = "We present the design of an analog Silicon Photonic MEMS phase shifter based on vertically moving adiabatic couplers. Using a two-step electrostatic actuation method, the phase shifter can be turned on selectively by applying an actuation voltage on a first pair of electrodes, and the phase of the optical signal can be tuned continuously by applying an actuation voltage at a second electrode pair. A mechanical movement of only 20nm at 19V actuation voltage allows for a full π phase shift. The design exhibits a compact footprint of 60um × 44um and low excess insertion loss below 0.1dB.",

keywords = "Adiabatic Coupler, Optical Switch, Phase Control, Photonic Integrated Circuit, Silicon Photonic MEMS",

author = "Hamed Sattari and Teodoro Graziosi and Marcell Kiss and Seok, {Tae Joon} and Sangyoon Han and Wu, {Ming C.} and Niels Quack",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 ; Conference date: 13-08-2017 Through 17-08-2017",

year = "2017",

month = sep,

day = "26",

doi = "10.1109/OMN.2017.8051437",

language = "English",

series = "International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE Computer Society",

booktitle = "2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings",

}

Sattari, H, Graziosi, T, Kiss, M, Seok, TJ, Han, S, Wu, MC & Quack, N 2017, Analog silicon photonic MEMS phase-shifter with double-step electrostatic actuation. in 2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings., 8051437, International Conference on Optical MEMS and Nanophotonics, IEEE Computer Society, 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017, Santa Fe, United States, 13/08/17. https://doi.org/10.1109/OMN.2017.8051437

Analog silicon photonic MEMS phase-shifter with double-step electrostatic actuation. / Sattari, Hamed; Graziosi, Teodoro; Kiss, Marcell et al.
2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings. IEEE Computer Society, 2017. 8051437 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Analog silicon photonic MEMS phase-shifter with double-step electrostatic actuation

AU - Sattari, Hamed

AU - Graziosi, Teodoro

AU - Kiss, Marcell

AU - Seok, Tae Joon

AU - Han, Sangyoon

AU - Wu, Ming C.

AU - Quack, Niels

PY - 2017/9/26

Y1 - 2017/9/26

N2 - We present the design of an analog Silicon Photonic MEMS phase shifter based on vertically moving adiabatic couplers. Using a two-step electrostatic actuation method, the phase shifter can be turned on selectively by applying an actuation voltage on a first pair of electrodes, and the phase of the optical signal can be tuned continuously by applying an actuation voltage at a second electrode pair. A mechanical movement of only 20nm at 19V actuation voltage allows for a full π phase shift. The design exhibits a compact footprint of 60um × 44um and low excess insertion loss below 0.1dB.

AB - We present the design of an analog Silicon Photonic MEMS phase shifter based on vertically moving adiabatic couplers. Using a two-step electrostatic actuation method, the phase shifter can be turned on selectively by applying an actuation voltage on a first pair of electrodes, and the phase of the optical signal can be tuned continuously by applying an actuation voltage at a second electrode pair. A mechanical movement of only 20nm at 19V actuation voltage allows for a full π phase shift. The design exhibits a compact footprint of 60um × 44um and low excess insertion loss below 0.1dB.

KW - Adiabatic Coupler

KW - Optical Switch

KW - Phase Control

KW - Photonic Integrated Circuit

KW - Silicon Photonic MEMS

UR - http://www.scopus.com/inward/record.url?scp=85035003968&partnerID=8YFLogxK

U2 - 10.1109/OMN.2017.8051437

DO - 10.1109/OMN.2017.8051437

M3 - Conference contribution

AN - SCOPUS:85035003968

T3 - International Conference on Optical MEMS and Nanophotonics

BT - 2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings

PB - IEEE Computer Society

T2 - 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017

Y2 - 13 August 2017 through 17 August 2017

ER -

Analog silicon photonic MEMS phase-shifter with double-step electrostatic actuation

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