A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design

Hoe Joon Kim; Soon In Jung; Jeronimo Segovia-Fernandez; Gianluca Piazza

doi:10.1109/MEMSYS.2018.8346668

A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design

Hoe Joon Kim
, Soon In Jung
, Jeronimo Segovia-Fernandez
, Gianluca Piazza

Department of Robotics and Mechatronics Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

This paper presents experimental studies of flicker frequency (1/f) noise of 1 GHz aluminum nitride (AlN) contour mode resonators (CMR) as a function of electrode design. AlN CMRs with various electrode dimensions and different top electrode materials of Al, Au, and Pt are fabricated to give a wide range of thermoelastic damping (TED), which directly impacts the flicker noise of CMRs. We have measured the flicker noise of a total of 64 devices and the results show that flicker noise decreases with increasing Q, with a power law dependence which ranges from 1/Q^3.2 to 1/Q^3.8. Interestingly, the noise level also depends on the type of electrode materials, where the devices with Pt top electrode demonstrate the best noise performance. Our results indicate that a careful selection of the electrode material and dimensions could further reduce 1/f noise not only in AlN CMRs, but also in various classes of resonators, and thus enable ultra-low noise MEMS resonators for sensing and RF applications.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	767-770
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346668
State	Published - 24 Apr 2018
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18

Bibliographical note

Publisher Copyright:
© 2018 IEEE.

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10.1109/MEMSYS.2018.8346668

Cite this

Kim, H. J., Jung, S. I., Segovia-Fernandez, J., & Piazza, G. (2018). A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 767-770). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346668

Kim, Hoe Joon ; Jung, Soon In ; Segovia-Fernandez, Jeronimo et al. / A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 767-770 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design",

abstract = "This paper presents experimental studies of flicker frequency (1/f) noise of 1 GHz aluminum nitride (AlN) contour mode resonators (CMR) as a function of electrode design. AlN CMRs with various electrode dimensions and different top electrode materials of Al, Au, and Pt are fabricated to give a wide range of thermoelastic damping (TED), which directly impacts the flicker noise of CMRs. We have measured the flicker noise of a total of 64 devices and the results show that flicker noise decreases with increasing Q, with a power law dependence which ranges from 1/Q3.2 to 1/Q3.8. Interestingly, the noise level also depends on the type of electrode materials, where the devices with Pt top electrode demonstrate the best noise performance. Our results indicate that a careful selection of the electrode material and dimensions could further reduce 1/f noise not only in AlN CMRs, but also in various classes of resonators, and thus enable ultra-low noise MEMS resonators for sensing and RF applications.",

author = "Kim, \{Hoe Joon\} and Jung, \{Soon In\} and Jeronimo Segovia-Fernandez and Gianluca Piazza",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",

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doi = "10.1109/MEMSYS.2018.8346668",

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Kim, HJ, Jung, SI, Segovia-Fernandez, J & Piazza, G 2018, A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 767-770, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/01/18. https://doi.org/10.1109/MEMSYS.2018.8346668

A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design. / Kim, Hoe Joon; Jung, Soon In; Segovia-Fernandez, Jeronimo et al.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 767-770 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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PY - 2018/4/24

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N2 - This paper presents experimental studies of flicker frequency (1/f) noise of 1 GHz aluminum nitride (AlN) contour mode resonators (CMR) as a function of electrode design. AlN CMRs with various electrode dimensions and different top electrode materials of Al, Au, and Pt are fabricated to give a wide range of thermoelastic damping (TED), which directly impacts the flicker noise of CMRs. We have measured the flicker noise of a total of 64 devices and the results show that flicker noise decreases with increasing Q, with a power law dependence which ranges from 1/Q3.2 to 1/Q3.8. Interestingly, the noise level also depends on the type of electrode materials, where the devices with Pt top electrode demonstrate the best noise performance. Our results indicate that a careful selection of the electrode material and dimensions could further reduce 1/f noise not only in AlN CMRs, but also in various classes of resonators, and thus enable ultra-low noise MEMS resonators for sensing and RF applications.

AB - This paper presents experimental studies of flicker frequency (1/f) noise of 1 GHz aluminum nitride (AlN) contour mode resonators (CMR) as a function of electrode design. AlN CMRs with various electrode dimensions and different top electrode materials of Al, Au, and Pt are fabricated to give a wide range of thermoelastic damping (TED), which directly impacts the flicker noise of CMRs. We have measured the flicker noise of a total of 64 devices and the results show that flicker noise decreases with increasing Q, with a power law dependence which ranges from 1/Q3.2 to 1/Q3.8. Interestingly, the noise level also depends on the type of electrode materials, where the devices with Pt top electrode demonstrate the best noise performance. Our results indicate that a careful selection of the electrode material and dimensions could further reduce 1/f noise not only in AlN CMRs, but also in various classes of resonators, and thus enable ultra-low noise MEMS resonators for sensing and RF applications.

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Kim HJ, Jung SI, Segovia-Fernandez J, Piazza G. A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 767-770. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346668

A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design

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