A study on flicker frequency noise of piezoelectric aluminum nitride resonators as a function of electrode design

Hoe Joon Kim, Soon In Jung, Jeronimo Segovia-Fernandez, Gianluca Piazza

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This paper presents experimental studies of flicker frequency (1/f) noise of 1 GHz aluminum nitride (AlN) contour mode resonators (CMR) as a function of electrode design. AlN CMRs with various electrode dimensions and different top electrode materials of Al, Au, and Pt are fabricated to give a wide range of thermoelastic damping (TED), which directly impacts the flicker noise of CMRs. We have measured the flicker noise of a total of 64 devices and the results show that flicker noise decreases with increasing Q, with a power law dependence which ranges from 1/Q3.2 to 1/Q3.8. Interestingly, the noise level also depends on the type of electrode materials, where the devices with Pt top electrode demonstrate the best noise performance. Our results indicate that a careful selection of the electrode material and dimensions could further reduce 1/f noise not only in AlN CMRs, but also in various classes of resonators, and thus enable ultra-low noise MEMS resonators for sensing and RF applications.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages767-770
Number of pages4
ISBN (Electronic)9781538647820
DOIs
StatePublished - 24 Apr 2018
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Conference

Conference31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/TerritoryUnited Kingdom
CityBelfast
Period21/01/1825/01/18

Bibliographical note

Publisher Copyright:
© 2018 IEEE.

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