Abstract
This paper presents experimental studies of flicker frequency (1/f) noise of 1 GHz aluminum nitride (AlN) contour mode resonators (CMR) as a function of electrode design. AlN CMRs with various electrode dimensions and different top electrode materials of Al, Au, and Pt are fabricated to give a wide range of thermoelastic damping (TED), which directly impacts the flicker noise of CMRs. We have measured the flicker noise of a total of 64 devices and the results show that flicker noise decreases with increasing Q, with a power law dependence which ranges from 1/Q3.2 to 1/Q3.8. Interestingly, the noise level also depends on the type of electrode materials, where the devices with Pt top electrode demonstrate the best noise performance. Our results indicate that a careful selection of the electrode material and dimensions could further reduce 1/f noise not only in AlN CMRs, but also in various classes of resonators, and thus enable ultra-low noise MEMS resonators for sensing and RF applications.
Original language | English |
---|---|
Title of host publication | 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 767-770 |
Number of pages | 4 |
ISBN (Electronic) | 9781538647820 |
DOIs | |
State | Published - 24 Apr 2018 |
Event | 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018 |
Publication series
Name | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
---|---|
Volume | 2018-January |
ISSN (Print) | 1084-6999 |
Conference
Conference | 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 |
---|---|
Country/Territory | United Kingdom |
City | Belfast |
Period | 21/01/18 → 25/01/18 |
Bibliographical note
Publisher Copyright:© 2018 IEEE.