A medium energy ion scattering analysis of the Si-SiO 2 interface formed by ion beam oxidation of silicon
- Young Pil Kim
- , Si Kying Choi
- , Yong Ho Ha
- , Sehun Kim
- , Hyun Kyong Kim
- , Dae Won Moon
Research output: Contribution to journal › Article › peer-review
5
Scopus
citations